Systec Logo Nottulner Landweg 90
D-48161 Münster

Tel.: +49 2534 8001-70
Fax: +49 2534 8001-77
info@systec.de
 

Quickfinder

Quickly discover the adequate DriveSets

How many axes?

Einachsige Lineareinheiten für Bewegung in der linearen Dimension
Zweiachsige Lineareinheiten für Bewegung in der Ebene
Dreiachsige Lineareinheiten für Bewegung im Raum

Prefered velocity?
(in m/s)

0,10,415

Which payload has to be positioned?
(max. 40 kg)

Select the desired precision

 0,025 mm
 0,1 mm
 0,4 mm



Legal Info Datenschutz

DriveSet M256A in a spraying system

The DriveSet in a wafer production system is made out of stainless steel.
The DriveSet in this wafer production system is made out of stainless steel.

Application: Spraying in a system for production of semiconductors

DriveSet: M256A

Workspace: 250 x 250 mm

Velocity: 0,4 m/s

Precision class: 0,1 mm

Load carrying capacity: 15 kilos

Special construction feature
Ball screw assembly, adapter plates, motor adapter and DriveSet bearings were implemented in stainless steel. It is deployed in an environment in which the work pieces are cleaned with a sodium hydroxide solution making durable and easily cleaned material necessary.

Description
The DriveSet is used in a spraying process for the customer’s wafer-chip production.

Equipment

Biaxial console construction with support axis in a horizontal installation. Drive with ball screw assembly and servo motors with encoder feed back. Add-on reference switch and electrical cable routing.