Application: Spraying in a system for production of semiconductors
Workspace: 250 x 250 mm
Velocity: 0,4 m/s
Precision class: 0,1 mm
Load carrying capacity: 15 kilos
Special construction feature
Ball screw assembly, adapter plates, motor adapter and DriveSet bearings were implemented in stainless steel. It is deployed in an environment in which the work pieces are cleaned with a sodium hydroxide solution making durable and easily cleaned material necessary.
The DriveSet is used in a spraying process for the customer’s wafer-chip production.
Biaxial console construction with support axis in a horizontal installation. Drive with ball screw assembly and servo motors with encoder feed back. Add-on reference switch and electrical cable routing.